Manuilenko, O.V.; Minaeva, K.M.; Golota, V.I.
(Вопросы атомной науки и техники, 2006)
Single and dual frequency capacitively coupled plasma (CCP) sources operating in pure Ar, O₂ and Ar/O₂ mixtures
are investigated by means of particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations. The different ...