Ponomarev, A.G.; Kolinko, S.V.; Rebrov, V.A.; Kolomiets, V.N.; Kravchenko, S.N.
(Вопросы атомной науки и техники, 2018)
To obtain micrometric gratings with a high aspect ratio by lithographic technique, it is proposed to use a proton
beam focused in a line and electromagnetic scanning in the transverse direction to irradiate the resistive ...