Efremov, A.; Klimovskaya, A.; Kamins, T.; Shanina, B.; Grygoryev, K .; Lukyanets, S .
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2005)
A model of catalytically enhanced CVD growth of a silicon nanowire assembly on a substrate is developed, and growth process is simulated. Thermodynamic-kinetic theory is used for modeling of molecular transport in the gas ...