Hubarevich, A.; Jaguiro, P.; Mukha, Y.; Smirnov, A.; Solovjov, Ya.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2010)
A new approach to nanoporous silicon formation is proposed. Anomalies both
in low current densities and low fluorine ion concentrations, which is lead to low
uniformity of formed porous silicon, are under consideration. ...