Fedorovich, O.A.; Hladkovska, O.V.; Hladkovskyi, V.V.; Nedybaliuk, A.F.
(Вопросы атомной науки и техники, 2021)
The results of researches of plasma chemical treatment of lithium monocrystalline tantalate (LiTaO₃) from gas type, bias voltage (energy of chemically active ions) and from current of additional bias generator are given. ...