Sobol, O.V.; Andreev, A.A.; Gorban, V.F.; Stolbovoy, V.A.; Meylekhov, A.A.; Postelnyk, A.A.; Dolomanov, A.V.
(Вопросы атомной науки и техники, 2016)
For multilayer coating system ZrN/CrN determined the effect of the pressure of the working atmosphere of nitrogen (PN), DC (-Us) and pulse (-Ui) negative bias potential during the deposition and the thickness of the layers ...