Kryuchyn, A.A.; Lapchuk, A.S.; Bryts’kyi, A.I.; Kostyukevych, S.O.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2012)
Analyzed in this work are the requirements to an optical system for laser
thermolithographic recording. It has been shown that possibilities of this type recording
with decreasing the registered element sizes can be ...