Tseluyko, A.F.; Lazurik, V.T.; Ryabchikov, D.L.; Hassanein, A.; Borgun, I.V.; Sereda, I.N.; Borisko, S.V.
(Вопросы атомной науки и техники, 2011)
In the paper the level of high-current pulse discharge plasma influence on the chamber wall is carried out, that is
important for position choosing of the nanolithographer first collecting mirror with gas-discharge radiation ...