Grytsenko, K.P.; Kolomzarov, Yu.V.; Belyaev, O.E.; Schrader, S.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2016)
The paper summarizes in brief applications of perfluoropolymer thin films deposited from the gas phase by several different methods, for protection of various materials and devices both at the research stage and already ...