Begun, E.V.; Bratus’, O.L.; Evtukh, A.A.; Kaganovich, E.B.; Manoilov, E.G.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2007)
The processes of charge accumulation in the MOS structures with SiO₂ films
containing Si nanocrystals are investigated, depending on the conditions of their
formation by pulsed laser deposition. High-frequency capacity-voltage ...