Перегляд за автором "Sereda, K.N."

Сортувати за: Порядок: Результатів:

  • Surface wave plasma source for broad-beam ion and electron production 
    Azarenkov, N.A.; Bizyukov, A.A.; Gapon, A.V.; Olefir, V.P.; Kashaba, A.Y.; Sereda, K.N.; Tarasov, I.K. (Вопросы атомной науки и техники, 2004)
    The new type of multipurpose plasma source based on the surface wave sustained discharge is presented. The plasma in the source is generated by the RF surface wave discharge excited by the antenna system placed inside ...
  • TiN coating etching from a surface of the instrument in beam-plasma system 
    Bizyukov, A.A.; Kashaba, A.Y.; Sereda, K.N.; Sleptsov, V.V.; Danziger, М.; Phiodorov, S. (Вопросы атомной науки и техники, 2000)
    The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic ...
  • Сharging processes and phase states of macroparticles in low-pressure arc discharge 
    Bizyukov, А.А.; Chibisov, А.D.; Sereda, K.N.; Romashchenko, E.V.; Dimitrova, V. (Вопросы атомной науки и техники, 2013)
    The effects of plasma density and ionic charge on the floating potential of the solitary macroparticle (MP) in a low-pressure arc discharge have been investigated. The energy balance has been studied taking into account ...