Azarenkov, N.A.; Bizyukov, A.A.; Gapon, A.V.; Olefir, V.P.; Kashaba, A.Y.; Sereda, K.N.; Tarasov, I.K.
(Вопросы атомной науки и техники, 2004)
The new type of multipurpose plasma source based on the surface wave sustained discharge is presented. The
plasma in the source is generated by the RF surface wave discharge excited by the antenna system placed inside ...