Lonin, Yu.F.; Pilipets, Yu.O.; Khovansky, N.A.; Sheremet, V.I.; Shirokov, B.M.
(Вопросы атомной науки и техники, 2004)
The installation for gas-phase deposition of materials is developed. Gas- dynamic parameters of a vapor-gas
mixture flow in the reaction volume by flow-around of the surface being coated are evaluated. The processes ...