Azarenkov, N.A.; Bizyukov, I.A.; Kashaba, A.Y.; Sereda, K.N.
(Вопросы атомной науки и техники, 2004)
A new solid ion accelerator based on magnetron sputtering discharge is described. The ions of working gas are
used to bombard and sputter a cylindrical target made of metal or dielectric material. The sputtered atoms can ...