Virko, V.F.; Kirichenko, G.S.; Shamrai, K.P.
(Вопросы атомной науки и техники, 2003)
Employing of the electrodeless, low-pressure inductive discharges (ICPs) is preferable in many applications. A helicon discharge, which is known as the most efficient magnetized ICP [1], operates with excitation of ...