Azarenkov, N.A.; Bizyukov, A.A.; Bizyukov, I.A.; Bobkov, V.V.; Kashaba, A.E.; Krieger, K.; Sereda, K.N.; Tarasov, I.K.
(Вопросы атомной науки и техники, 2003)
A new solid ion source is described. The ion source based on hollow-cylindrical magnetron sputtering discharge produces the beam of various solid ions (B, C, Si, Ti, V, Fe, Ni, Ta, W) which are then extracted by an ion ...