Bazhenov, V.Yu.; Tsiolko, V.V.; Piun, V.M.; Chaplinskiy, R.Yu.; Kuzmichev, A.I.
(Вопросы атомной науки и техники, 2013)
Glow characteristics of capacitive radio frequency discharge with isolated electrodes in low-current α and highcurrent γ modes are determined experimentally. It is shown that transition from α mode to γ mode occurs through ...