Baron, D.I.; Chernyshenko, V.Ya.; Korovin, V.B.; Kramskoy, E.D.; Maznichenko, S.M.; Shtan, A.F.; Solodovchenko, S.I.
(Вопросы атомной науки и техники, 2013)
An experiment on chamber RF cleaning for 12 hours a day during 2 weeks with the subsequent vacuum pumping out was carried out. The plasma was produced by the UHF generator with the frequency of 2.4 GHz. Afterwards, the VHF ...