Bizyukov, A.A.; Sereda, K.N.; Sleptsov, V.V.; Tarasov, I.K.; Chunadra, A.G.
(Вопросы атомной науки и техники, 2012)
In this work, the characteristics of high-current operation modes of planar magnetron sputtering system with magnetically insulated anode without going to the arc discharge mode is investigated. The possibility of using ...