Stetsenko, B.V.; Shchurenko, A.I.; Zavyalov, Yu.G.
(Вопросы атомной науки и техники, 2009)
A magnetron set up with a hemispherical concave cathode has been worked out for the first time. The cathode
center of curvature was registered with the sputtered surface. An aluminum nitride film was sputtered by this ...