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Перегляд Вопросы атомной науки и техники за автором "Dakhov, A.N."

Репозиторій DSpace/Manakin

Перегляд Вопросы атомной науки и техники за автором "Dakhov, A.N."

Сортувати за: Порядок: Результатів:

  • Actinometric study of oxygen dissociation in ICP source 
    Dakhov, A.N.; Dudin, S.V. (Вопросы атомной науки и техники, 2014)
    Results of actinometric study of oxygen dissociation in ICP source are presented. For atomic oxygen the emission lines of 844.6 nm was chosen having low impact of dissociative excitation. Actinometer gas in the experiments ...
  • Conversion of carbon dioxide in low-pressure plasma 
    Dudin, S.V.; Dakhov, A.N. (Вопросы атомной науки и техники, 2018)
    The paper reports the results of experimental study of efficiency of carbon dioxide conversion to CO and O₂ in gas-discharge plasma at low gas pressure. The inductively coupled plasma source operates at 13.56 MHz in the ...
  • Dependence of RF breakdown curve on electrode geometry in CCP reactor 
    Dudin, S.V.; Dakhov, A.N.; Lisovskiy, V.A.; Pletniov, V.M. (Вопросы атомной науки и техники, 2012)
    The results of experimental and theoretical study of RF capacitively coupled discharge breakdown in reactor for reactive ion etching of semiconductors are presented. Taking into account complex geometry of the reactor with ...
  • Forming a unipolar pulsed discharge in nitrogen 
    Lisovskiy, V.A.; Ogloblina, P.A.; Dudin, S.V.; Yegorenkov, V.D.; Dakhov, A.N. (Вопросы атомной науки и техники, 2016)
    This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range (from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. ...
  • Influence of secondary electron emission on the RF gas breakdown 
    Dakhov, A.N.; Dudin, S.V. (Вопросы атомной науки и техники, 2013)
    The influence of the electron impact secondary electron emission on the RF gas breakdown has been researched experimentally and theoretically with use of particle-in-sell simulation. The experiments and simulations are ...

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