Klimenko, І.О.; Marinin, V.G.; Bortnitskaya, M.A.; Kuprin, A.S.
(Вопросы атомной науки и техники, 2022)
Studies on the influence of technological parameters (cathode-substrate distance, substrate temperature, bias voltage, arc current) of vacuum-arc titanium deposition coatings have shown that the deposition rate from one ...