Masunov, E.S.; Polozov, S.M.; Kozlov, A.V.; Kuibeda, R.P.; Kulevoy, T.V.; Seleznev, D.N.
(2010)
The ribbon ion sources for ion implantation are under developing in ITEP during last 5 years. The several versions of Bernas ion source are used for ribbon ion beam production. The beam transport for low energy ribbon beam ...