The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating

Домашня сторінка
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Фізико-технічні та математичні науки
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Відділення фізики і астрономії
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Semiconductor Physics Quantum Electronics & Optoelectronics
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Semiconductor Physics Quantum Electronics & Optoelectronics, 2001, том 4
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Semicond. Physics Quantum Electronics & Optoelectronics, 2001, № 4
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dc.contributor.author	Agueev, O.A.
dc.contributor.author	Svetlichny, A.M.
dc.date.accessioned	2017-06-06T13:18:24Z
dc.date.available	2017-06-06T13:18:24Z
dc.date.issued	2001
dc.identifier.citation	The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating / O.A. Agueev, A.M. Svetlichny // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2001. — Т. 4, № 4. — С. 307-312. — Бібліогр.: 15 назв. — англ.	uk_UA
dc.identifier.issn	1560-8034
dc.identifier.other	PACS: 61.72 H, 73.40 Q
dc.identifier.uri	http://dspace.nbuv.gov.ua/handle/123456789/119334
dc.description.abstract	In the work a complex analysis of the influence of size of components and heating temperature upon stresses and defect formation in substrates of the Si-SiO₂ structures is done. It is determined that alteration of shape and size of components can change stresses in the silicon substrate by an order, and the increase in heating temperature from 800 to 1100 °C increases the defect formation criterion by two orders. The optimum size and shape alteration range as well as the heating temperature for defect-free thermal treatment of structures are determined.	uk_UA
dc.language.iso	en	uk_UA
dc.publisher	Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України	uk_UA
dc.relation.ispartof	Semiconductor Physics Quantum Electronics & Optoelectronics
dc.title	The influence of heating temperature and sizes of components upon stresses and defect formation in semiconductor structures under isothermal heating	uk_UA
dc.type	Article	uk_UA
dc.status	published earlier	uk_UA