Lysiuk, V.O.; Staschuk, V.S.; Kluy, M.I.; Vakulenko, O.V.; Poperenko, L.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2007)
The systems “thin Ni film – lithium niobate” and “thin Pd film – lithium
tantalate” are implanted by Ar⁺ ions with an energy of 100 keV and a dose of 10¹⁶ cm⁻².
Analyses of the systems by AFM and SEM have shown that the ...