Kryuchyn, A.A.; Petrov, V.V.; Rubish, V.M.; Lapchuk, A.S.; Kostyukevych, S.O.; Shepeliavyi, P.E.; Kostyukevych, K.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2014)
Thin films of glassy chalcogenide semiconductor are widely used as recording
media in optical data storage. To obtain relief micro- and nanoscale structures on the
surface of optical master discs inorganic photoresists ...