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періодичних видань НАН України
періодичних видань НАН України
Structure of Fe-Cu coatings prepared by the magnetron sputtering method
Репозиторій DSpace/Manakin
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Structure of Fe-Cu coatings prepared by the magnetron sputtering method
Інші назви:
Структура Fe-Cu-покрытий, нанесенных методом магнетронного распыления
Тема:
Низкотемпературная плазма и плазменные технологии
Посилання:
Structure of Fe-Cu coatings prepared by the magnetron sputtering method / K. Nowakowska-Langier, K. Zdunek, R. Chodun, R. Nietubyc, R. Mirowski, J. Witkowski // Вопросы атомной науки и техники. — 2010. — № 6. — С. 159-161. — Бібліогр.: 7 назв. — англ.
Підтримка:
This work was supported by a grant no. 4743/B/T02/2009/37 from the State Committee for Scientific Research in Poland.
Дата:
2010
Переглядів:
1001
Завантажень:
753
Анотація:
This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured.
