Determination of chemical composition of implanted nanolayers by analysis of their optical properties

Abstract

The method for determining the composition of nanolayer from the experimental spectra of optical transmission and reflection was developed. Modeling of the optical properties of the composite was carried out on the basis of Bruggeman’s effective medium theory. This method was applied to samples of silica glass implanted with Cu⁻ ion beam of 60 keV energy and at various current densities. The structure and thickness of nanolayer are determined using transmission electron microscopy method. On the basis of the optical spectra analysis the range of photons energy (3.5 ÷ 4.5 eV) was selected. Composition of the implanted layers in the form of volume concentrations of it’s components (copper, cuprous oxide (Cu₂O) and substrate material) were obtained.