Effect of substrate temperature on structural and substructural properties of MgO thin films

Abstract

In this paper we have studied the influence of substrate temperature deposition on structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. The thin films of MgO were prepared by spray pyrolysis technique from magnesium chloride solution. We have established the phase composition, the lattice constant, coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of the homogeneous single-phase films of stoichiometric composition were identified.