Перегляд за автором "Dudin, S.V."

Сортувати за: Порядок: Результатів:

  • Gapon, A.V.; Dahov, A.N.; Dudin, S.V.; Zykov, A.V.; Azarenkov, N.A. (Вопросы атомной науки и техники, 2006)
    The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution ...
  • Dakhov, A.N.; Dudin, S.V. (Вопросы атомной науки и техники, 2014)
    Results of actinometric study of oxygen dissociation in ICP source are presented. For atomic oxygen the emission lines of 844.6 nm was chosen having low impact of dissociative excitation. Actinometer gas in the experiments ...
  • Zykova, A.V.; Dudin, S.V.; Polozhiy, K.I. (Вопросы атомной науки и техники, 2003)
    The technology of synthesis of multilayer coatings on the basis of alumina oxide and structures, like tricalcium phosphate and hydroxylapatite, was suggested by Reactive Ion-Beam Synthesis (RIBS) method in a same vacuum ...
  • Dudin, S.V.; Dakhov, A.N. (Вопросы атомной науки и техники, 2018)
    The paper reports the results of experimental study of efficiency of carbon dioxide conversion to CO and O₂ in gas-discharge plasma at low gas pressure. The inductively coupled plasma source operates at 13.56 MHz in the ...
  • Dudin, S.V.; Dakhov, A.N.; Lisovskiy, V.A.; Pletniov, V.M. (Вопросы атомной науки и техники, 2012)
    The results of experimental and theoretical study of RF capacitively coupled discharge breakdown in reactor for reactive ion etching of semiconductors are presented. Taking into account complex geometry of the reactor with ...
  • Dudin, S.V.; Farenik, V.I.; Dahov, A.N.; Walkowicz, J. (Физическая инженерия поверхности, 2005)
    The technique of arc suppression on the target surface of magnetron sputtering system during reactive deposition of Al₂O₃ coatings has been developed. Damping of arcs is achieved by transient polarity change of the ...
  • Dudin, S.V.; Zykov, A.V.; Dahov, A.N.; Farenik, V.I. (Вопросы атомной науки и техники, 2006)
    The results of systematic experimental researches of plasma-chemical etching reactor in the inductive mode are presented in this paper. Measurements of the integral discharge parameters (inductor voltage, gas pressure, ...
  • Lisovskiy, V.A.; Ogloblina, P.A.; Dudin, S.V.; Yegorenkov, V.D.; Dakhov, A.N.; Farenik, V.I. (Журнал физики и инженерии поверхности, 2016)
    This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon ...
  • Lisovskiy, V.A.; Ogloblina, P.A.; Dudin, S.V.; Yegorenkov, V.D.; Dakhov, A.N. (Вопросы атомной науки и техники, 2016)
    This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range (from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. ...
  • Dakhov, A.N.; Dudin, S.V. (Вопросы атомной науки и техники, 2013)
    The influence of the electron impact secondary electron emission on the RF gas breakdown has been researched experimentally and theoretically with use of particle-in-sell simulation. The experiments and simulations are ...
  • Yakovin, S.D.; Dudin, S.V.; Zykov, A.V.; Farenik, V.I. (Вопросы атомной науки и техники, 2011)
    At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron ...
  • Lisovskiy, V.A.; Krol, H.H.; Dudin, S.V. (Вопросы атомной науки и техники, 2018)
    The results of investigations of a glow discharge in carbon dioxide by the method of optical emission spectroscopy are presented. Processes in negative glow, positive column and anode glow are considered in detail. In ...
  • Dudin, S.V. (Физическая инженерия поверхности, 2012)
    The paper is devoted to experimental verification of theoretical model of Langmuir probe operation in ion-beam plasma. The mathematical model of single cylindrical Langmuir probe describes dependence of ion current ...
  • Walkowicz, J.; Zykov, A.V.; Dudin, S.V.; Yakovin, S.D. (Вопросы атомной науки и техники, 2007)
    The investigation results of the DC magnetron sputtering system for synthesis of high-quality oxide coatings are presented. In the system oxygen, activated by an independent Inductively-Coupled Plasma (ICP) source, is ...
  • Dudin, S.V.; Rafalskyi, D.V.; Naymark, D.A. (Вопросы атомной науки и техники, 2012)
    The mathematical model of single cylindrical Langmuir probe describing dependence of positive ion current gathered by the probe on the basic parameters of electronegative plasma, such as probe potential, densities of ...
  • Dudin, S.V.; Dahov, A.N.; Farenik, V.I. (2010)
    The results of systematic experimental researches of ICP reactor are presented. Experimental results on spatial distribution of local plasma parameters (plasma density, temperature and electron energy distribution function) ...
  • Antonova, T.N.; Dudin, S.V.; Farenik, V.I. (Вопросы атомной науки и техники, 2003)
    The mathematical model of single cylindrical Langmuir probe describing dependence of ion current gathered by the probe on the basic parameters of ion-beam plasma, such as probe potential, cold and beam ion densities, ...
  • Dudin, S.V. (Вопросы атомной науки и техники, 2013)
    A review of known designs of bipolar particle sources is presented classifying them by spatial or temporal separation of the oppositely charged particles. Both ion-electron and ion-ion sources are considered. Possibilities ...