Zhuravel, I.A.; Bugayev, Ye.A.; Penkov, A.V.; Zubarev, E.N.; Sevryukova, V.A.; Kondratenko, V.V.
(Functional Materials, 2014)
Formation of intermixing zones, their structure and phase composition in C/Si multilayers in as-deposited state and after annealing are studied. During deposition intermixing zones of ∼ 0.6 m thick are formed at both ...