Chunadra, А.G.; Sereda, К.N.; Tarasov, I.K.; Vereshchaka, Y.A.
(Вопросы атомной науки и техники, 2020)
The work is devoted to improvement of magnetron discharge parameters based on a standard magnetron sputtering system (MSS) of the MAG-5 type with an additional anode magnetic trap for discharge electrons in the conditions ...