Dudin, S.; Tkachenko, O.; Shchybria, A.; Yakovin, S.; Zykov, A.; Yefymenko, N.
(Вопросы атомной науки и техники, 2018)
The design and characteristics of a new combined magnetron-ion-beam sputtering system are presented. The system allows coating deposition both by means of magnetron discharge, and by sputtering of complex composite targets ...