Sobol, O.V.; Postelnyk, H.O.; Meylekhov, A.A.; Subbotina, V.V.; Stolbovoy, V.A.; Dolomanov, A.V.; Kolesnikov, D.A.; Kovaleva, M.G.; Sukhorukova, Yu.V.
(Вопросы атомной науки и техники, 2020)
Layers based on titanium nitride doped with molybdenum and silicon were used to create a multilayer composite. In this case, the mismatch between the lattice periods of (TiMo)N and (TiSi)N layers was about 1%. It was found ...