Bortchagovsky, E.G.; Vasin, A.V.; Lytvyn, P.M.; Tiagulskyi, S.I.; Slobodian, A.M.; Verovsky, I.N.; Strelchuk, V.V.; Stubrov, Yu.; Nazarov, A.N.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2016)
Exploiting CVD technique for carbon deposition from C₂H₂+H₂+N₂ mixture, a graphene-like film synthesized directly on SiO₂ surface of SiO₂-Si structure was obtained. The graphene-like film was grown under thin Ni layer that ...