Onoprienko, A.A.; Ivashchenko, V.I.; Timofeeva, I.I.; Sinelnitchenko, А.К.; Butenko, О.А.
(Сверхтвердые материалы, 2015)
Quaternary Ti–B–C–N films have been deposited onto Si (100) substrates by dc magnetron sputtering of bi-component Ti/B₄C target in an Ar/N₂ gas mixture with different amounts of nitrogen in the mixture (from 0 to 50%). The ...