Lukyanchikova, N.; Garbar, N.; Kudina, V.; Smolanka, A.; Simoen, E.; Claeys, C.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2008)
The results of low-frequency noise investigation in fully-depleted (FD)
nFinFETs of Weff = 0.02 to 9.87 µm, Leff = 0.06 to 9.9 µm, processed on standard (SOI)
and strained (sSOI) wafers are presented. It is shown that ...