Shalaev, R.V.; Varyukhin, V.N.; Prudnikov, A.M.; Linnik, A.I.; Zhikharev, I.V.; Belousov, N.N.; Raspornya, D.V.; Ulyanov, A.N.
(Functional Materials, 2008)
The influence of electromagnetic radiation and oxygen impurity in the growth atmosphere on the growth processes of nanostructured carbon nitride CNx films has been studied. The oxygen impurity in the gas mixture and an UV ...