Sobol’, O.V.; Andreev, A.A.; Stolbovoy, V.A.; Kolesnikov, D.A.; Kovaleva, M.G.; Meylekhov, A.A.; Postelnyk, Н.О.; Dolomanov, А.V.; Sagaidashnikov, Yu.Ye.; Kraievska, Zh.V.
(Вопросы атомной науки и техники, 2019)
To determine the patterns of structural engineering of vacuum-arc coatings based on niobium nitride in the NbN/Cu multilayer composition, the effect of layer thickness and bias potential on the structural-phase state and ...