Sobol’, O.V.; Andreev, A.A.; Mygushchenko, R.P.; Stolbovoy, V.A.; Postelnуk, A.A.; Meylekhov, A.A.; Dolomanov, A.V.; Rebrova, Ye.M.
(Вопросы атомной науки и техники, 2018)
It is proposed to use the multiperiod binanolayer composites (TiAlSi)N/MeN (Me-Zr, Nb, Cr, Mo) for controlling the structure, stress state and mechanical properties of a multi-element nitride (TiAlSi)N. The deposition of ...