Yasunas, A.; Kotov, D.; Shiripov, V.; Radzionay, U.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2013)
One of the basic operations in the LED (light-emitting diode) chip fabrication
technique is formation of dielectric coatings for the purpose of insulation and surface
passivation of the LED structure. Oxides and nitrides ...