Gribov, N.N.; Caro, J.; Oosterlaken, T. G. M.; Radelaar, S.
(Физика низких температур, 1997)
We have made an electron-microscopy study of nanoholes in membranes in successive stages of metal deposition using two different techniques: physical vapor deposition (PVD) and chemical vapor deposition (CVD). One-sided ...