Bizyukov, A.A.; Kashaba, A.Y.; Sereda, K.N.; Sleptsov, V.V.; Danziger, М.; Phiodorov, S.
(Вопросы атомной науки и техники, 2000)
The results of reactive ion-plasma etching of TiN coatings from a surface of the tool in a beam-plasma system are submitted. The researches were made on the industrial set-up of a type «the Plasma boiler» with a magnetic ...