Gasilin, V. V.; Zavaleyev, V.A.; Nezovibat’ko, Yu. N.; Shvets, O.M.; Taran, V.S.; Skorina, E.V.
(Вопросы атомной науки и техники, 2006)
Experimental results of coating deposition with application of an “open architecture” filter to reduce the dropwise
component in the discharge [1,2] are presented in this paper. The filter is located in a separate chamber ...