Panasyuk, A.D.; Podchernyaeva, I.A.; Neshpor, I.P.; Gawalek, W.; Ivanov, V.N.
(Functional Materials, 2009)
Wear and corrosion resistant coatings have been obtained by HF magnetron sputtering of an AlN-TiCrB₂ target (prepared by powder metallurgy technique) on Si, Al₂O₃ and GaAs single crystals. The coatings are characterized ...