Safonov, V.; Miroshnichenko, K.; Zykova, A.; Zavaleyev, V.; Walkowicz, J.; Rogowska, R.
(Вопросы атомной науки и техники, 2017)
The study presents the technology of the formation of amorphous ta-C films, deposited by pulsed vacuum-arc method with the use of a water-cooled electromagnetic Venetian blind plasma filter. The effect of the substrate ...