Venger, E.F.; Melnichuk, L.Yu.; Melnichuk, A.V.; Semikina, T.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2015)
The conductive ZnO films deposited using atomic layer deposition (ALD) on the optical glass substrates were studied using the modified method of the disturbed total internal reflection within the range 400…1400 cm⁻¹ for ...