Donkov, N.; Zykova, A.; Safonov, V.; Mateev, E.
(Вопросы атомной науки и техники, 2009)
The study of e-beam evaporated Ta₂O₅ film structure and properties effect on cell/material response was performed.
The surface properties and structure of e-beam evaporated Ta₂O₅ films were investigated by means of XPS ...