Pashchenko, G.A.; Kravetskyi, M.Yu.; Fomin, A.V.
(Semiconductor Physics Quantum Electronics & Optoelectronics, 2015)
Used in this work is the stationary model of the process of chemical-anddynamical polishing (CDP) the substrates in the case of balance between diffusion, convective and chemical fluxes. Obtained has been an analytical ...