Kalinichenko, A.I.; Kozionov, S.A.; Strelnitskij, V.E.
(Вопросы атомной науки и техники, 2016)
In the model of nonlocal thermoelastic peak of low-energy ion a formula for intrinsic stress in multi-component material deposited from mixed beam of differently charged ions in modes of DC and pulse bias potentials is ...